This book covers the experimental and theoretical understanding of surface and thin film processes. It presents a unique description of surface processes in adsorption and crystal growth, including bonding in metals and semiconductors. Emphasis is placed on the strong link between science and technology in the description of, and research for, new devices based on thin film and surface science. Practical experimental design, sample preparation and analytical techniques are covered, including detailed discussions of Auger electron spectroscopy and microscopy. Thermodynamic and kinetic models of electronic, atomic and vibrational structure are emphasized throughout. The book provides extensive leads into practical and research literature, as well as to resources on the World Wide Web. Each chapter contains problems which aim to develop awareness of the subject and the methods used.
Aimed as a graduate textbook, this book will also be useful as a sourcebook for graduate students, researchers and practioners in physics, chemistry, materials science and engineering.