Microsystem Technology

Par : Oliver Paul, W Menz, Jürgen Mohr

Formats :

  • Paiement en ligne :
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    • Retrait Click and Collect en magasin gratuit
  • Nombre de pages500
  • PrésentationRelié
  • Poids1.105 kg
  • Dimensions18,0 cm × 24,5 cm × 3,0 cm
  • ISBN3-527-29634-4
  • EAN9783527296347
  • Date de parution17/01/2001
  • ÉditeurWiley-VCH

Résumé

This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.
This completely revised edition of a bestselling concise introduction to microsystems technology includes the latest trends in this emerging scientific discipline. The chapters on silicium and LIGA technology are greatly expanded, whilst new topics include application aspects in medicine and health technology, lithography and electroplating.