Mechanical Microsensors

Note moyenne 
Remco Wiegerink et Miko Elwenspoek - Mechanical Microsensors.
This books provides a comprehensive description of the principles of sensors for mechanical quantities fabricated by silicone micromachining. Since sensor design... Lire la suite
203,29 € Neuf
Expédié sous 7 à 15 jours
Livré chez vous entre le 21 août et le 29 août
En librairie

Résumé

This books provides a comprehensive description of the principles of sensors for mechanical quantities fabricated by silicone micromachining. Since sensor design and sensor fabrication requires work in an interdisciplinary field, carried out by engineers trained in various disciplines, the presentation is made accessible to engineers trained in electrical and mechanical engineering, physics and chemistry. Accordingly, the basic science needed for the design of mechanical microsensors is discussed starting from a fairly elementary level, including scaling of physical laws, mechanics of deformation of beams and diaphragms, transducer principles, the basics of fluid flow and heat transfer and electronic circuits. The reader is introduced into the basics of silicon micromachining and sensor packaging. Relevant issues regarding design, fabrication and performance are illustrated in numerous examples for pressure sensors, force sensors, accelerometers, gyroscopes and flow sensors.

Sommaire

  • MEMS
    • Introduction into Silicon Micromachining
    • Mechanics of Membranes and Beams
    • Principles of Measuring Mechanical Quantities : Transduction of deformation
    • Force and Pressure Sensors
    • Acceleration and Angular Rate Sensors
    • Flox Sensors
    • Resonant Sensors
    • Electronic Interfacing
    • Packaging.

Caractéristiques

  • Date de parution
    15/12/2000
  • Editeur
  • Collection
  • ISBN
    3-540-67582-5
  • EAN
    9783540675822
  • Présentation
    Relié
  • Nb. de pages
    295 pages
  • Poids
    0.59 Kg
  • Dimensions
    16,2 cm × 24,2 cm × 1,7 cm

Avis libraires et clients

Les clients ont également aimé

Derniers produits consultés

Decitre utilise des cookies pour vous offrir le meilleur service possible. En continuant votre navigation, vous en acceptez l'utilisation. En savoir plus OK
203,29 €